Textbooks and tutorials (free accessible online):
Materials Science of Thin Films: Deposition and Structure, by Milton Ohring, 2002. link
Thin Film Deposition: Principles and Practice, by Donald L. Smith, 1995. link
Pulsed Laser Deposition of Thin Films: Applications-led Growth of Functional Materials, by R. Eason, 2006. link
Atomic Layer Deposition for Semiconductors, by C.S. Hwang and C.Y. Yoo (Ed.), 2012. link
Introduction to Solid State Physics, by Charles Kittel, 8th edition, John Wiley & Sons, 2018. link
Modern Semiconductor Device for Integrated Circuits, by Chenming Hu, 2009. link
Physics of Semiconductor Devices, by S.M. Sze, 2006. link
Microchip Fabrication, A Practical Guide to Semiconductor Processing, by Peter Van Zant, McGraw-Hill, Inc., 2014. link
Materials Characterization: Introduction to Microscopic and Spectroscopic Methods, by Yang Leng, 2nd Edition, Wiley-VCH 2013. link
Elements of X-Ray Diffraction, by B.D. Cullity and S.R. Stock, 3rd edition, Pearson Education 2011. link
Transmission Electron Microscopy : A Textbook for Materials Science, by D.B. Williams and C.B. Carter, 2009. link
Scanning Transmission Electron Microscopy Imaging and Analysis, by S.J. Pennycook and P.D. Nellist, Springer 2011. link
Software (free accessible online):
3D illustration software:
3D crystal structure illustration:
Characterization and image analysis: